MEMS mirror device and optical disk apparatus

Details MEMS mirror device and optical disk apparatus MEMS mirror device and optical disk apparatus

2005-12-06

2005-12-06

Spector, David N. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S224200, C369S044140, C369S112290

Reexamination Certificate

active

06972890

ABSTRACT:
A MEMS mirror device includes a rectangular frame, a mirror unit having a reflecting portion on one face thereof and connected via the hinges inside the frame, and a drive unit for tilting the mirror unit around the hinges as the axis, wherein the frame has two protruding portions spaced at a regular interval and extending into the frame on both sides of a connected portion with the hinge, and an elastic member is provided to bridge the hinge between two protruding portions.

REFERENCES:
patent: A-64-073536 (1989-03-01), None

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