Array of micromirrors with non-fixed underlying structures

Array of thin film actuated mirrors and method for the manufactu

Array of thin film actuated mirrors having a levelling member

Array of thin film actuated mirrors having an improved optical e

Assembly for static control and dynamic damping of an optical el

Atomic layer deposition on micro-mechanical devices

Bistable light modulator

Conformal all-reflective beam-steering (CARBS) device

Deflecting instrument, controllable reflecting device herefor an

Deformable mirror

Deformable mirror

Deformable mirror

Deformable mirror device and manufacturing method thereof

Deformable mirror for short wavelength applications

Deformable mirror having displacement detecting function

Deformable mirror system having replaceable actuators

Deformable mirror using piezoelectric actuators formed as an...

Device and method for stacked multi-level uncoupled...

Device and method for stacked multi-level uncoupled...

Device for fabricating improved mirror arrays for physical...