Array of thin film actuated mirrors and method for the manufactu

Details Array of thin film actuated mirrors and method for the manufactu Array of thin film actuated mirrors and method for the manufactu

1997-12-23

2000-08-15

Epps, Georgia

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359223, 359291, 359295, 359318, 359855, G02B 2608, G02B 508, G02F 129

Patent

active

06104525&

ABSTRACT:
An inventive array of M.times.N thin film actuated mirrors includes an active matrix, a passivation layer, an etchant stopping layer and an array of M.times.N actuating structures. The active matrix includes a substrate, an array of M.times.N transistors, an adhesion layer, a diffusion barrier layer, an array of M.times.N connecting terminals and a stress balancing layer. The passivation layer is formed on top of the active matrix and the etchant stopping layer is formed on top of the passivation layer. The array of M.times.N actuating structures includes a first thin film electrode, a thin film electrodisplacive member, a second thin film electrode, an elastic member and a conduit. The diffusion barrier layer located between the substrate and the connecting terminal prevents diffusion of silicon (Si) from the substrate to the connecting terminals.

REFERENCES:
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patent: 5421974 (1995-06-01), Witt
patent: 5604140 (1997-02-01), Byun
patent: 5665209 (1997-09-01), Byun
patent: 5668411 (1997-09-01), Hong et al.
patent: 5757539 (1998-05-01), Min
patent: 5822109 (1998-10-01), Jeon

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