Device and method for stacked multi-level uncoupled...

Details Device and method for stacked multi-level uncoupled... Device and method for stacked multi-level uncoupled...

2008-09-09

2008-09-09

Amari, Alessandro (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S295000

Reexamination Certificate

active

10545949

ABSTRACT:
A multi-level decoupled micro-actuator device comprising a first level substrate (410), a second level frame (420) stacked on said first level substrate (410), a third level frame (430) stacked on said second level frame (420).

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