Array of micromirrors with non-fixed underlying structures

Details Array of micromirrors with non-fixed underlying structures Array of micromirrors with non-fixed underlying structures

2007-03-29

2009-10-20

Sugarman, Scott J (Department: 2873)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S291000

Reexamination Certificate

active

07605964

ABSTRACT:
The present invention discloses an array of micromirrors with non-fixed underlying structures which can be oriented to have principal rotational axis with no structural and mechanical interference and with no electrical conflict. The micromirror array in the present invention can reproduce various surfaces including spherical, aspherical (e.g. parabolic, hyperbolic, elliptical, etc.), anamorphic, other than rotational symmetric profiles. With the newly introduced non-fixed underlying structure, the present invention makes possible for a micromirror array to generate a desired optical surface profile by simple motion controls and to improve structural stability, simplicity, flexibility, and efficiency in motion and motion control.

REFERENCES:
patent: 6025951 (2000-02-01), Swart et al.
patent: 2006/0238852 (2006-10-01), Strumpell
patent: 2007/0195439 (2007-08-01), DeNatale et al.

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