Deformable mirror device and manufacturing method thereof

Details Deformable mirror device and manufacturing method thereof Deformable mirror device and manufacturing method thereof

1999-04-30

2000-10-03

Dang, Hung Xuan

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359291, 359290, 359298, G02B 2608

Patent

active

061281212

ABSTRACT:
A deformable mirror device and manufacturing method therefore. The method includes the steps of forming an electrode layer on a substrate in a predetermined pattern, forming a thick film on the upper surfaces of the substrate and the electrode layer, forming a support plate on the upper surface of the thick film, and partially etching the thick film to form at least one through hole. The method further includes separating the support plate into single portions, forming a post on one side of the inner surface of the through hole, forming a reflecting plate on the upper surface of the support plate, and removing the thick film.

REFERENCES:
patent: 4710732 (1987-12-01), Hornbeck
patent: 5083857 (1992-01-01), Hornbeck
patent: 5447600 (1995-09-01), Webb

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