Deformable mirror for short wavelength applications

Details Deformable mirror for short wavelength applications Deformable mirror for short wavelength applications

1998-06-15

1999-11-16

Phan, James

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359846, 359849, G02B 2608

Patent

active

059867957

ABSTRACT:
A deformable mirror compatible with short wavelength (extreme ultraviolet) radiation that can be precisely controlled to nanometer and subnanometer accuracy is described. Actuators are coupled between a reaction plate and a face plate which has a reflective coating. A control system adjusts the voltage supplied to the actuators; by coordinating the voltages supplied to the actuators, the reflective surface of the mirror can be deformed to correct for dimensional errors in the mirror or to produce a desired contour.

REFERENCES:
patent: 4655563 (1987-04-01), Plante et al.

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