Deformable mirror

Details Deformable mirror Deformable mirror

2008-07-08

2008-07-08

Cherry, Euncha P (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S295000

Reexamination Certificate

active

07397593

ABSTRACT:
A deformable mirror includes a deformable section in which, a reflecting surface is formed, a fixing section which fixes an outer periphery of the deformable section, a GND electrode which is formed on the deformable section, a drive electrode which is provided facing the GND electrode, and a driving-signal source which deforms the deformable section by an electric voltage applied between the GND electrode and the drive electrode. The deformable mirror is sealed such that a pressure inside to be lower than an atmospheric pressure, and is provided with a capacitance detecting circuit which detects a change in response characteristics of the deformable section associated with a pressure change of a sealed-inside.

REFERENCES:
patent: 4422723 (1983-12-01), Williams, Jr. et al.
patent: 6791741 (2004-09-01), Hishioka
patent: 2003/0184887 (2003-10-01), Greywall et al.
P. Grosso et al.,“The membrane mirror as an adaptive optical element”, Journal of the Optical Society of America, vol. 67, No. 3, Mar. 1977.
Bifano T.G. et al., “High-Speed Wavefront Control Using MEMS Micromirrors”, Proceedings of SPIE, 5895:1-9 (2005), XP-002427939.
Takami H., “Membrane Deformable Mirror for Subaru Adapative Optics”, Proceedings of SPIE, 2201:762-767 (1994), XP-002427940.

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