Deformable mirror

Optical: systems and elements – Deflection using a moving element – By moving a reflective element

Reexamination Certificate

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Details

C359S223100, C359S198100, C359S291000

Reexamination Certificate

active

07123397

ABSTRACT:
A deformable mirror has a first deforming portion that has a reflection surface, a second deforming portion surrounding the first deforming portion and has lower mechanical stiffness than that of the first deforming portion, a fixing portion fixing a peripheral portion of the second deforming portion, deformer for acting on the first deforming portion to deform the first deforming portion and second deforming portion, and restrictor for restricting deformation in a main deforming direction of a portion of the first deforming portion that is outside an operation region of the deformer.

REFERENCES:
patent: 5170283 (1992-12-01), O'Brien et al.
patent: 2004/0047051 (2004-03-01), Kaneko
patent: 2004/0201908 (2004-10-01), Kaneko
patent: 2006/0012851 (2006-01-01), Wu et al.
patent: 37 12 145 (1988-03-01), None
patent: 2-101402 (1990-04-01), None

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