Velocity sensor and semiconductor exposing apparatus using such

Velocity transducer

Vertical component accelerometer

Vertical MEMS gyroscope by horizontal driving

Vertically integrated 3-axis MEMS accelerometer with...

Vertically integrated MEMS structure with electronics in a...

Vertically mounted accelerometer chip

Vibrating accelerometer-multisensor

Vibrating accelerometer-multisensor

Vibrating beam accelerometer

Vibrating beam accelerometer

Vibrating beam accelerometer

Vibrating beam accelerometer

Vibrating beam accelerometer

Vibrating beam accelerometer

Vibrating beam accelerometer

Vibrating beam accelerometer and method for manufacturing the sa

Vibrating beam accelerometer with velocity change output

Vibrating beam accelerometers and methods of forming vibrating b

Vibrating beam force sensor