Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1993-04-26
1995-10-31
Chilcot, Richard
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
73517AV, G01P 1508
Patent
active
054619181
ABSTRACT:
A device for measuring acceleration based on the shift in resonant frequency of a vibrating cantilevered beam in response to an acceleration force having a component along its major axis is disclosed. Such accelerometers may be manufactured by micromachining in silicon, and comprise one or more beams, each provided with drive means for keeping the beam in vibration at the resonant frequency, and detection means for sensing changes in the resonant frequency. The sensitivity of accelerometers according to the invention is determined by the length of the cantilevered beam, a factor easily controlled during manufacture, and by the resonant frequency of the beam, which is continuously measured in use. Accelerometers constructed according to the invention are self-calibrating, self-testing and susceptible to large-scale batch manufacture.
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Chilcot Richard
Felber Joseph L.
Ford Motor Company
Lippa Allan J.
May Roger L.
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