Package for electro-mechanical systems
Package for MEMS devices
Package structure for an acceleration sensor
Packaged accelerometer
Parallel plate type oscillatory gyroscope
Parametric amplification of a MEMS gyroscope by capacitance...
Parylene capacitive accelerometer utilizing electrical...
Passive and wireless acoustic wave accelerometer
Passive laser accelerometer
Peak-recording accelerometer
Pendular non-servoed tuning beam accelerometer
Pendulous accelerometer and/or inclinometer
Pendulous accelerometer with balanced gas damping
Pendulous Accelerometer with electrostatic rebalancing
Pendulous assembly for use in an accelerometer
Pendulous assembly for use in an accelerometer
Pendulous assembly for use in an accelerometer
Pendulous assembly including specifically configured mounting pa
Pendulous in-plane MEMS accelerometer device
Pendulous oscillating gyroscopic accelerometer