Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1996-11-25
1999-12-07
Moller, Richard A.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
7351437, G01P 1510
Patent
active
059964111
ABSTRACT:
An accelerometer formed from a semiconducting substrate and first and second active layers coupled to the opposite surfaces of the substrate. The substrate has a frame and a proof mass suspended from the frame by one or more flexures for rotation about an input axis in response to an applied force. The active layers each include a vibratory force transducer mechanically coupled to the proof mass for detecting a force applied to the proof mass. With this configuration, the transducers are located on either side of the substrate, which improves the differential design symmetry of the force detecting apparatus. This reduces the common mode non-linear response characteristics of the accelerometer, particularly in high dynamics applications, where high performance is required.
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Leonardson Ronald B.
Woodruff James R.
Allied-Signal Inc.
Moller Richard A.
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