Vertically integrated MEMS structure with electronics in a...

Details Vertically integrated MEMS structure with electronics in a... Vertically integrated MEMS structure with electronics in a...

2006-09-12

2006-09-12

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S504040

Reexamination Certificate

active

07104129

ABSTRACT:
A MEMS assembly having a MEMS subassembly sandwiched between and bonded to a cap and a base is provided. The MEMS subassembly includes at least one MEMS device element flexibly connected to the MEMS assembly. The vertical separation between the MEMS device element and an electrode on the base is lithographically defined. Precise control of this critical vertical gap dimension is thereby provided.

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