Vibrating accelerometer-multisensor

Details Vibrating accelerometer-multisensor Vibrating accelerometer-multisensor

1987-06-25

1988-05-17

Chapman, John

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

73510, G01P 904, G01P 1513

Patent

active

047442484

ABSTRACT:
A vibrating multisensor, each using two accelerometers which are vibrated along straight lines perpendicular to their sensing axes. The sensing axes are co-linear, the accelerometers are vibrated in phase opposition along parallel axes. The accelerometers preferably use a proof mass and flexure suspension made on a silicon wafer sandwiched between two other wafers that carry electrodes both for sensing displacement and forcing of the central accelerometer wafer.

REFERENCES:
patent: 2544646 (1951-03-01), Barnaby et al.
patent: 4510802 (1985-04-01), Peters
patent: 4590801 (1986-05-01), Merhav

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