Vibrating accelerometer-multisensor

Details Vibrating accelerometer-multisensor Vibrating accelerometer-multisensor

1986-07-10

1988-05-17

Chapman, John

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

73510, G01P 1508, G01P 904

Patent

active

047442492

ABSTRACT:
A vibrating multisensor, each using two accelerometers which are vibrated along straight lines perpendicular to their sensing axes. In one embodiment, the sensing axes are co-linear, and in another embodiment the sensing axes are perpendicular. The accelerometers preferably use a proof mass and flexure suspension made on a silicon wafer sandwiched between two other wafers that carry electrodes both for sensing displacement and forcing of the central accelerometer wafer.

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