Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate
2006-04-11
2006-04-11
Kwok, Helen (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
C073S514290, C073S862590
Reexamination Certificate
active
07024934
ABSTRACT:
Microelectromechanical system (MEMS) integrated micro devices and acceleration sensor devices formed of first and second silicon wafers that are permanently joined together in a composite silicon wafer having an array of first complete stand-alone three-dimensional micromechanical device features formed in the first silicon wafer, an array of second complete stand-alone three-dimensional micromechanical device features formed in the second silicon wafer, and one or more composite three-dimensional micromechanical device features formed of first partial three-dimensional micromechanical device features formed in the first silicon wafer that are permanently joined to cooperating second partial three-dimensional micromechanical device features formed in the second silicon wafer.
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Honeywell International , Inc.
Kwok Helen
Rupnick Charles J.
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