Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1998-02-23
1999-09-07
Chapman, John E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
G01P 1508
Patent
active
059489820
ABSTRACT:
Accelerometers and methods of forming accelerometers are described. The accelerometers are provided with electrically conductive structure configured for connection with external circuitry. The electrically conductive structure has a folded-back architecture which reduces temperature-induced anomalies which can adversely impact acceleration-sensing function of the accelerometer.
REFERENCES:
patent: 3221256 (1965-11-01), Walden
patent: 4030347 (1977-06-01), Norris et al.
patent: 4035675 (1977-07-01), Malocha et al.
patent: 4200849 (1980-04-01), Malocha
patent: 4215570 (1980-08-01), Eer Nisse
patent: 4372173 (1983-02-01), Eer Nisse et al.
patent: 4384264 (1983-05-01), Kadota
patent: 4499393 (1985-02-01), Stokes et al.
patent: 4573357 (1986-03-01), Meunier
patent: 4676104 (1987-06-01), Cullen
patent: 4699006 (1987-10-01), Boxenhorn
patent: 4872342 (1989-10-01), Hanson et al.
patent: 4891982 (1990-01-01), Norling
patent: 4901586 (1990-02-01), Blake et al.
patent: 5005413 (1991-04-01), Novak et al.
patent: 5020370 (1991-06-01), Deval et al.
patent: 5025346 (1991-06-01), Tang et al.
patent: 5136266 (1992-08-01), Niitsuma
patent: 5186053 (1993-02-01), Egley et al.
patent: 5186844 (1993-02-01), Burd et al.
patent: 5304965 (1994-04-01), Manner
patent: 5349855 (1994-09-01), Bernstein
patent: 5365138 (1994-11-01), Saw et al.
patent: 5367217 (1994-11-01), Norling
patent: 5392650 (1995-02-01), O'Brian et al.
patent: 5396200 (1995-03-01), Machui
patent: 5485051 (1996-01-01), Tera
patent: 5491604 (1996-02-01), Nguyen et al.
patent: 5495761 (1996-03-01), Diem et al.
patent: 5496436 (1996-03-01), Bernstein et al.
patent: 5500549 (1996-03-01), Takeuchi et al.
patent: 5501103 (1996-03-01), Woodruff et al.
patent: 5553506 (1996-09-01), Benz et al.
patent: 5594170 (1997-01-01), Peters
"Independent Tuning Of The Linear And Nonlinear Stiffness Coefficients Of A Micromechanical Device", Scott G. Adams et al, 1996, Conference: Proceedings of Ninth International Workshop on Micro Electromechanical Systems, Feb. 11-15, 1996, pp. 32-37.
"Vibrating Structure Gyroscope", British Aerospace Ltd., 1994.
"Silicon Resonant Angular Rate Sensor Using Electromagnetic Excitation And Capacitive Detection", M. Hashimoto et al., J. Micromech. Micro eng. 5 (1995) 219-225.
Laminated High-Aspect-Ratio Microstructures In A Conventional CMOS Process, G.K. Fedder, et al., 1996 IEEE, pp. 13-18.
"Vibrating Beam Accelerometers", Chapter 5, 1984, Modern Inertial Technology, pp. 72-83.
"Polycrystalline Silicon Carbide For Surface Micromachining", A.J. Fleischman et al, 1996 IEEE, pp. 234-238.
"Electroplated Thick CoNiMnP Permanent Magnet Arrays For Micromachined Magnetic Device Applications", Trifon Liakopoulos et al, 1996 IEEE, pp. 79-84.
"Coriolis Rate Gyros (CRG)", L. W. Richardson, 1994 IEEE.
"Integrating SCREAM Micromachined Devices With Integrated Circuits", Kevin A. Shaw et al, 1996 IEEE, pp. 44-48.
"Mechanical Properties Of Thick, Surface Micromachined Polysilicon Films", H. Khan et al, 1996 IEEE, pp. 343-348.
"A Micromachined Comb-Drive Tuning Fork Rate Gyroscrope", Dr. Marc Weinberg et al, C.S. Draper Laboratory, pp. 595-601. (undated)
"Micromachined Gyroscopes", Jan Soderkvist, Sensors and Actuators A, 43 (1994) pp. 65-71.
"Initial Results On Micromachined Comb Drive Gyroscope With EDM2 Electronics", M. Weinberg et al, 1993 C.S. Draper Laboratory.
"A Microactuator System For The Study And Control Of Screech In High Speed Jets", Chunchieh Huang et al, 1996 IEEE, pp. 19-24.
"Transverse Mode Electronic Microactuator For Mems-Based HDD Slider", Takahiro Imamura et al, 1996 IEEE, pp. 216-221.
"Electrostatically Balanced Comb Drive For Controlled Levitation", William Tang, 1990, Technical Digest, IEEE Solid-State Sensor and Actuator Workshop, pp. 23-27.
"Electrostatic Comb Drive Levitation And Control Method", William Tang et al, Journal of Microelectromechanical Systems, vol. 1, No. 4, Dec. 1992, pp. 170-178.
"A Navigation Grade Micro-Machined Silicon Accelerometer", Mark Helsel et al, 1994 IEEE, pp. 51-58.
"Electrostatic Comb Drive Of Lateral Polysilicon Resonators", William Tang et al, 1990, Sensors and Actuators A (Physical), vol. A21, No. 1-3, pp. 328-331.
Leonardson Ronald B.
Woodruff James R.
Allied-Signal Inc.
Chapman John E.
LandOfFree
Vibrating beam accelerometers and methods of forming vibrating b does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Vibrating beam accelerometers and methods of forming vibrating b, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vibrating beam accelerometers and methods of forming vibrating b will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1805963