Velocity sensor and semiconductor exposing apparatus using such

Details Velocity sensor and semiconductor exposing apparatus using such Velocity sensor and semiconductor exposing apparatus using such

1992-12-08

1995-04-04

Noland, Tom

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7386171, 324661, 324662, 324161, G01P 322

Patent

active

054026806

ABSTRACT:
A velocity sensor for detecting velocity even in a low velocity range has a velocity detecting element including a movable micromember, a deviation amount detecting device, a holding device and a velocity signal calculating device. The movable micromember is rotatably supported around a center of gravity for generating a frictional force or a dynamical pressure that is proportional to a velocity of a fluid. The deviation amount detecting device detects a deviation amount around the center of gravity of the movable micromember to generate an output voltage, which is proportional to the detected deviation amount. The holding device provides a holding force, which is proportional to the output voltage of the deviation amount detecting device, to the movable micromember and holds the movable micromember to a position around the center of gravity. The velocity signal calculating device calculates a velocity signal from the output of the deviation amount detecting device.

REFERENCES:
patent: 3488581 (1970-01-01), Foster
patent: 4451780 (1984-05-01), Ogasawara
patent: 4550616 (1985-11-01), Mott
patent: 4631959 (1986-12-01), Motycka
patent: 5003517 (1991-03-01), Greer, Jr.
Rognert, et al., "Liga-based Flexible Microstructures for Fiber-Chip Coupling," J. Micromech. Microeng., Jun. 1991, pp. 167-170.

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