Micromechanical anchor structure
Micromechanical angular accelerometer with auxiliary linear acce
Micromechanical apparatus with limited actuation bandwidth
Micromechanical capacitive acceleration sensor
Micromechanical capacitive acceleration sensor
Micromechanical comb structure
Micromechanical component
Micromechanical component
Micromechanical component
Micromechanical component and method for producing the...
Micromechanical component comprising an oscillating body
Micromechanical component having closely spaced apart anchoring
Micromechanical device
Micromechanical device
Micromechanical gradient sensor
Micromechanical gyroscopic transducer with improved drive and se
Micromechanical gyroscopic transducer with improved drive and se
Micromechanical inertial sensor
Micromechanical inertial sensor
Micromechanical inertial sensor having increased pickoff...