Measuring and testing – Speed – velocity – or acceleration – Response to multiple sensing means or motion conditions
Patent
1993-08-06
1995-12-12
Williams, Hezron E.
Measuring and testing
Speed, velocity, or acceleration
Response to multiple sensing means or motion conditions
7350404, G01P 900, G01P 1500
Patent
active
054739454
ABSTRACT:
A micromechanical accelerometer comprises a mass of monocrystalline silicon in which a substantially symmetrical plate attached to a silicon frame by flexible linkages is produced by selective etching. The plate has a plurality of apertures patterned and etched therethrough to speed further etching and freeing of the plate and flexible linkages, suspending them above a void etched beneath. The plate is capable of limited motion about an axis created by the flexible linkages. An accelerometer comprised of a substantially symmetrical, linkage supported plate configuration is implemented as an angular accelerometer paired with an auxiliary linear accelerometer, which is used to compensate for the linear sensitivity of the angular sensor, to achieve an instrument that is insensitive to linear acceleration and responds to angular acceleration.
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Boxenhorn Burton
Grieff Paul
Weinberg Marc S.
Kwok Helen C.
The Charles Stark Draper Laboratory Inc.
Williams Hezron E.
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