Micromechanical inertial sensor

Details Micromechanical inertial sensor Micromechanical inertial sensor

2005-06-21

2005-06-21

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

active

06907782

ABSTRACT:
A micromechanical inertial sensor that includes three component planes, namely a bottom part, a center part and a cover part. The center part is a silicon wafer in which a cardan-type (i.e. gimbal) structure with two oscillating elements is formed. A plate is formed in the silicon wafer which can be pivoted about a rotational axis lying in the wafer plane. Metallized portions or conductive layers form an exciter unit and set the gimbal structure oscillating. The inventive sensor further comprises a device for detecting the displacement of the plate. In addition, a method for manufacturing a micromechanical inertial sensor.

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