Micromechanical comb structure

Details Micromechanical comb structure Micromechanical comb structure

1999-02-25

2000-09-26

Moller, Richard A.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73862626, G01P 15125

Patent

active

061229644

ABSTRACT:
Micromechanical comb structure includes a first comb device having a plurality of prongs and a second comb device having a plurality of prongs. The prongs of the first comb device and the prongs of the second comb device mesh with one another so that they are arranged side-by-side in pairs to form measuring capacitors. The prongs of at least one of the comb devices are designed to produce a variation in the mechanical natural frequencies of the prongs.

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patent: 4918349 (1990-04-01), Shiba et al.
patent: 4954795 (1990-09-01), Choi
patent: 5142185 (1992-08-01), Noel et al.
patent: 5481102 (1996-01-01), Hazelrigg, jr.

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