Micromechanical component

Details Micromechanical component Micromechanical component

2007-10-02

2007-10-02

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S504150

Reexamination Certificate

active

10523187

ABSTRACT:
In order to implement two different sensitivities simultaneously in one component, in particular in an acceleration sensor having a substrate, at least one spring device, and at least one seismic mass, it is proposed that the spring device be designed for an intrinsically nonlinear behavior corresponding to a progressive spring characteristic curve, in which a greater acceleration is associated at least locally with a greater rigidity (spring constant).

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Patent Abstracts of Japan, vol. 1997, No. 09, Sep. 30, 1997.

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