Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent
1992-03-16
1995-04-25
Williams, Hezron E.
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
73517B, G01P 904
Patent
active
054088771
ABSTRACT:
A double gimbal micromachined gyroscopic transducer is provided in a substrate having a pit extending downwardly from a top surface of the substrate. A gyroscopic transducer element suspended above the pit comprises an outer sense gimbal plate integral with the substrate, coupled to the substrate by a pair of flexible elements attached to opposite ends of the plate. The flexible elements are axially aligned to permit oscillatory motion about a sense axis passing through the flexible elements. The gyroscopic transducer further includes an inner drive gimbal plate integral with and interior to the sense gimbal plate. The drive gimbal plate is coupled to the sense gimbal plate by a second pair of flexible elements along an axis orthogonal to the first pair of flexible elements. The drive gimbal plate also includes a balanced mass generally centrally located on the drive gimbal plate. Also included are drive and sense electronics, for energizing the drive gimbal plate to oscillate about the drive axis, and for sensing any movement of the sense gimbal plate indicative of an angular rate about an input axis. The sense electronics includes a sense electrode disposed so as not to be in close proximity to and interfere with free oscillatory motion of the drive gimbal plate.
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Boxenhorn Burton
Greiff Paul
Oda Christine K.
The Charles Stark Draper Laboratory Inc.
Williams Hezron E.
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