Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1995-07-31
1996-12-10
Williams, Hezron E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
7351432, 73718, 73724, 3612833, G01P 1500, G01P 15125, G01L 912, H01G 700
Patent
active
055832911
ABSTRACT:
A micromachined structure having at least one anchor that includes a supporting substrate with a first and a second foot fixedly positioned on the surface of the substrate and each foot has a supporting edge, which edges are positioned in parallel spaced apart relationship, an elongated tether positioned in spaced relation from the surface of the substrate and extending from the micromachined structure parallel to the parallel supporting edges of the first and the second foot, and first and second risers extending along the supporting edges of the first foot and the second foot, respectively, and rising upwardly to the edges of the tether. The first and the second foot, the first and second risers and the tether being formed integrally by surface micromachining.
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R. Mullen et al., "Theoretical Modeling of Boundary Conditions in Microfabricated Beams", IEEE, New York, 1991, pp. 154-159.
Q. Meng et al., "Theoretical Modeling of Microfabricated Beams with Elastically Restrained Supports", Journal of Microelectromechanical Systems, vol. 2, No. 3, IEEE, Sep. 1993, pp. 128-137.
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L. Ristic et al., "A Two-Chip Accelerometer System For Automotive Applications", Microsystems Technologies 1994 Conference, 4th International Conference Micro Electro Opto, Mechanical Systems & Components, Berlin, Oct. 1994, pp. 77-84.
Gutteridge Ronald J.
Koury, Jr. Daniel N.
Hightower Robert F.
Jackson Miriam
Moller Richard A.
Motorola Inc.
Williams Hezron E.
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