Micromechanical component having closely spaced apart anchoring

Details Micromechanical component having closely spaced apart anchoring Micromechanical component having closely spaced apart anchoring

1997-09-29

1999-11-16

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

361280, G01P 15125

Patent

active

059837217

ABSTRACT:
A micromechanical component includes a one-piece surface structure that is created on a substrate. The one-piece surface structure is attached to the surface of the substrate by at least two anchoring areas. The anchoring areas are a small distance apart, which is comparatively small in comparison with the lateral dimension of the surface structure. The surface structure has movable electrodes. Opposite them there are rigid electrodes that are attached to the substrate by additional anchoring areas. The additional anchoring areas also have a small distance between one another and to the anchoring areas.

REFERENCES:
patent: 5025346 (1991-06-01), Tang et al.
patent: 5428259 (1995-06-01), Suzuki
patent: 5763782 (1998-06-01), Moore et al.
William C. Tand et al., "Electrostatic Comb Drive Levitation and Control Method," Journal of Micromechanical Systems, vol. 1, No. 4, Dec. 1992, pp. 170-178, Dec. 1992.

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