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Vacuum processing apparatus and semiconductor manufacturing...

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type

Reexamination Certificate

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Vacuum processing system

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type

Patent

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Vacuum processing system

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type

Patent

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Vacuum processing system being able to carry process object...

Material or article handling – Apparatus for moving material between zones having different...

Reexamination Certificate

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Vacuum processing system being able to carry process object...

Material or article handling – Apparatus for moving material between zones having different...

Reexamination Certificate

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Vacuum processing unit and apparatus

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type

Patent

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Vacuum transfer device

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type

Patent

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Vacuum treatment device

Material or article handling – Apparatus for moving material between zones having different...

Reexamination Certificate

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Vacuum-to-vacuum entry system apparatus

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type

Patent

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Valve incorporating wafer handling arm

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type

Patent

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Valve/sensor assemblies

Material or article handling – Apparatus for moving material between zones having different...

Reexamination Certificate

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Vertical dual loadlock chamber

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type

Patent

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Vertical heat-treating apparatus and heat-treating process by us

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type

Patent

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