Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1986-09-08
1989-04-25
Werner, Frank L.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
118 50, 414222, B65G 6500
Patent
active
048243094
ABSTRACT:
A vacuum processing unit and apparatus comprises a buffer chamber that can be evacuated, a processing chamber that can be communicated with said buffer chamber a first sample carrier installed in said buffer chamber, a vacuum opening/closing device provided in the buffer chamber to correspond to the first sample carrier, a vacuum prechamber provided for the buffer chamber via the vacuum opening/closing device, a second sample carrier which carries the sample between the vacuum prechamber and the first sample carrier via the vacuum opening/closing device, and a third sample carrier which carries the sample between said first sample carrier and the processing chamber. The vacuum processing units can be connected in groups via vacuum opening/closing devices provided for the buffer chambers in locations corresponding to the end of the first sample carriers therein. The number of connected processing chambers can be freely changed to meet a change in the process or the manufacturing line.
REFERENCES:
patent: 3902615 (1975-09-01), Levy et al.
patent: 4278380 (1981-07-01), Guarino
patent: 4405435 (1983-09-01), Tateishi et al.
patent: 4483651 (1984-11-01), Nakane et al.
patent: 4553069 (1985-11-01), Purser
patent: 4619573 (1986-10-01), Rathmann et al.
Fukushima Yoshimasa
Kakehi Yutaka
Kanai Norio
Nakazato Norio
Shibata Fumio
Bucci David A.
Hitachi , Ltd.
Werner Frank L.
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