Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1984-04-16
1985-10-01
Spar, Robert J.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
277 3, 384121, 384124, 384134, F16C 3206, F16J 1540
Patent
active
045443173
ABSTRACT:
A vacuum-to-vacuum entry system which uses a rotary transport to transfer workpieces between two vacuum environments in a direction parallel to its axis of rotation and through the interface of a combination rotary gas bearing and seal. The combination gas bearing and seal seals off a zone in the gap between its two planar bearing surfaces that is radially offset from the axis of rotation of the bearing which is coincidental with the transport axis. Two arcuate gas sink channels on one of the bearing surfaces sink the gas of the bearing away from the zone. The bearing gas outside the zone in the gap and the two channels coact to effect a peripheral seal about the zone allowing the two vacuum environments when appropriately aligned to be in sealed communication with each other through the zone. A preferred embodiment is described for the transfer of ceramic substrates with circuitized surfaces between two vacuums environments.
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Bardales Norman R.
International Business Machines - Corporation
Millman Stuart J.
Spar Robert J.
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