Valve incorporating wafer handling arm

Details Valve incorporating wafer handling arm Valve incorporating wafer handling arm

1986-04-17

1988-08-16

Aschenbrenner, Peter A.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414222, 414225, B65G 2500

Patent

active

047640766

ABSTRACT:
A valve for a wafer processing machine is formed with a wedge-shaped sliding gate. A folded wafer handling arm is stored within the wedge and pumped to keep the arm clean while the valve is closed.

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patent: 3921788 (1975-11-01), Roberson, Jr. et al.
patent: 4318767 (1982-03-01), Hijikata et al.
patent: 4412771 (1983-11-01), Gerlach et al.
patent: 4433951 (1984-02-01), Koch et al.
patent: 4441852 (1984-04-01), Dixon
patent: 4483654 (1984-11-01), Koch et al.
patent: 4553069 (1985-11-01), Purser
patent: 4584045 (1986-04-01), Richards
patent: 4619573 (1986-10-01), Rathmann et al.

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