Vacuum transfer device

Details Vacuum transfer device Vacuum transfer device

1985-10-02

1987-02-17

Spar, Robert J.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

74110, 250561, 414749, 901 21, 901 27, A61K 2702, H01L 2168

Patent

active

046436278

ABSTRACT:
A vacuum transfer device includes a central processing chamber and a plurality of additional chambers radially positioned around the central chamber and in vacuum-tight connection therewith. A rotatable coulisse arrangement in the central chamber is extendable so as to reach into the additional chambers when correctly aligned. The device can transfer objects among several work stations without intermediate venting and re-evacuation of the system of chambers.

REFERENCES:
patent: 2817447 (1957-12-01), Bianca
patent: 3396601 (1968-08-01), Wright
patent: 3402835 (1968-09-01), Salil
patent: 3439815 (1969-04-01), Wagner et al.
patent: 3556329 (1971-01-01), Johnston et al.
patent: 3977550 (1976-08-01), Crawford et al.
patent: 4433951 (1984-02-01), Koch et al.
patent: 4553069 (1985-11-01), Purser
IBM Technical Disclosure Bulletin, vol. 17, No. 8, Jan. 1975, pp. 2268-2269, Y. Budo et al., "Modular Vacuum System".
IBM Technical Disclosure Bulletin, vol. 18, No. 2, Jul., 1975, pp. 341-342, J. C. Kenish et al., "Stepping Motor Actuated Chip Handler".

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