Vertical dual loadlock chamber

Details Vertical dual loadlock chamber Vertical dual loadlock chamber

1996-11-18

1999-06-08

Werner, Frank E.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414416, 414331, 414939, 414937, 118719, B65G 110

Patent

active

059099941

ABSTRACT:
A vacuum loadlock is provided for housing a pair of wafers in proper alignment for concurrent processing. In one embodiment, a single chamber loadlock is provided with a gas diffuser disposed therein to decrease venting times within the loadlock. In another embodiment, a dual chamber loadlock is provided having first and second isolatable regions disposed adjacent a transfer region to increase throughput of the system.

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