Vacuum processing system

Details Vacuum processing system Vacuum processing system

1996-03-07

1997-11-11

Werner, Frank E.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414416, 414937, 414939, 414940, 118719, 364478, B65H 508

Patent

active

056856849

ABSTRACT:
A vacuum treating apparatus having a vacuum treating chamber for treating a to-be-treated substrate in vacuum, includes a plurality of substrate cassettes which are installed in the open air and hold substrates that are to be conveyed into the vacuum treating chamber, a device for conveying the substrates between the substrate cassettes and the vacuum treating chamber, and a device which selects either that the to-be-treated substrate after treated in the vacuum treating chamber be held in the substrate cassette from which the to-be-treated substrate was taken out or that the to-be-treated substrate after treated in the vacuum treating chamber be held in another substrate cassette which is different from the substrate cassette.

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patent: 5314509 (1994-05-01), Kato et al.
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