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Method for reducing leaching in metal-coated MEMS

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Method for reducing removal forces for CMP pads

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
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Method for reducing the amount of perfluorocompound gas...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for releasing a micromechanical structure

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Method for removal of photoresist using sparger

Etching a substrate: processes – Nongaseous phase etching of substrate – Recycling – regenerating – or rejunevating etchant
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Method for removing a halogen-containing residue

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for removing a sacrificial material with a compressed...

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Method for removing aluminide coating from metal substrate...

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
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Method for removing aluminide coating from metal substrate...

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
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Method for removing an environmental coating

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Method for removing at least one area of a layer of a...

Etching a substrate: processes – Heating or baking of substrate prior to etching to change...
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Method for removing at least one area of a layer of a...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method for removing at least one area of a layer of a...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method for removing ceramic material from castings using caustic

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
Patent

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Method for removing coating from power unit components and...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Method for removing color resist for exposure alignment

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
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Method for removing conductive portions

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for removing copper oxide on the surface of a copper film

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Patent

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Method for removing defects from silicon bodies by a...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Method for removing metal cladding from airfoil substrate

Etching a substrate: processes – Nongaseous phase etching of substrate – Etching inorganic substrate
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