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Cu seed layer deposition for ULSI metalization

Etching a substrate: processes – Nongaseous phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Fabrication method to produce pit-free polysilicon buffer local

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Method and structure for forming an array of thermal sensors

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Method and structure for forming an array of thermal sensors

Etching a substrate: processes – Nongaseous phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Method for conditioning halogenated polymeric materials and stru

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Method of etching sendust and method of pattern-etching sendust

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Method of fabricating sub-micron structures in transparent...

Etching a substrate: processes – Nongaseous phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Method of forming microporous membranes

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Method of forming polarization reversal area, apparatus...

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Pattern formation method using light-induced suppression of...

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Planarization with reduced dishing

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Pre-etch implantation damage for the removal of thin film...

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Selective etching of silicate

Etching a substrate: processes – Nongaseous phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Semiconductor device fabrication method

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Technique for etching oxides and/or insulators

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Thin film lithium niobate structure and method of making the...

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