4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. Irradiating, ion implanting, alloying, diffusing, or...
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Technique for etching oxides and/or insulators

Etching a substrate: processes – Nongaseous phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
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Thin film lithium niobate structure and method of making the...

Etching a substrate: processes – Nongaseous phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
Reexamination Certificate

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