LandOfFree - US Patents - Listing for Etching a substrate: processes,Gas phase etching of substrate,With measuring, testing, or inspecting

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Methods and apparatus for controlling ion energy and plasma...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Reexamination Certificate

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Methods and apparatus for determining an etch endpoint in a...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Reexamination Certificate

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Methods and apparatus for in situ substrate temperature...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Reexamination Certificate

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Methods and apparatus for monitoring a process in a plasma...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Reexamination Certificate

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Methods and apparatus for monitoring a process in a plasma...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Reexamination Certificate

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Methods for detecting the endpoint of a photoresist...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Reexamination Certificate

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Methods for inspection sample preparation

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Reexamination Certificate

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Miniature optically transparent window

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Reexamination Certificate

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Monitor of plasma processes with multivariate statistical analys

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Patent

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Multi-layer/multi-input/multi-output (MLMIMO) models and...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Reexamination Certificate

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Multi-temperature processing

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Reissue Patent

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Multi-temperature processing

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting

Reissue Patent

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