4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. With measuring, testing, or inspecting
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In-situ and non-intrusive method for monitoring plasma etch cham

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Patent

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In-situ measurement of wafer position on lower electrode

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Interferometric endpoint detection in a substrate etching...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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