4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. With measuring, testing, or inspecting
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Optical control interface between controller and process...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Optical emisson spectroscopy (OES) method for monitoring and con

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Patent

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Optical monitoring and control system and method for plasma...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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