4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. With measuring, testing, or inspecting
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Cleaning of multicompositional etchant residues

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Confinement ring drive

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Control of etch selectivity

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Control of ion angular distribution function at wafer surface

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Control of semiconductor processing

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Controlled method for segmented electrode apparatus and...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Controlling plasma processing using parameters derived...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Critical dimension control in a semiconductor fabrication...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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