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Detection method of coating film thickness and ion...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
Reexamination Certificate

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Determining endpoint in etching processes using principal...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Disturbance-free, recipe-controlled plasma processing method

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Dry etching method

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Dry etching system and dry etching method using plasma

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Dry-etching process simulator

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Dual plasma source process using a variable frequency...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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