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Method of fabricating sub-micron metal lines

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method of forming one or more nanopores for aligning...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method of heating a semiconductor substrate

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method of manufacturing a vibrating structure gyroscope

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method of manufacturing surface acoustic wave device

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method of modulating resonant frequency of torsional MEMS...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method of reducing notching during reactive ion etching

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Method of removing hard carbon film formed on inner circumferent

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Methods and apparatus for etching semiconductor wafers and layer

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Methods for performing plasma etching operations on microelectro

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Methods for selective plasma etch

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Methods for substrate orientation

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Methods of enhancing selectivity of etching silicon dioxide...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Methods of etching silicon-oxide-containing materials

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Methods of fabricating microelectromechanical and...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Micromechanical mass flow sensor and method for the...

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Multi-step metallization etch

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Patterned coated articles and methods for producing the same

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Plasma processing apparatus and method

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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Plasma processing method

Etching a substrate: processes – Gas phase etching of substrate – Etching inorganic substrate
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