Method for compensating for nonuniform etch profiles

Method for correcting defects in a phase shift mask

Method for creating a digital micromirror device using an alumin

Method for creating inductive write head with steep shoulder...

Method for fabricating a silicon semiconductor substrate having

Method for fabricating an actuator system

Method for fabricating an optical device

Method for fabricating improved mirror arrays for physical...

Method for fabricating micro and nano structures

Method for fabricating micro optical elements using CMP

Method for fabricating micromachined members coupled for...

Method for fabricating planar optical waveguide devices

Method for fabricating spacer support structures useful in flat

Method for fabricating tapered edges on integrated optoelectroni

Method for fabrication of multi-step structures using...

Method for forming a concave micro-relief in a substrate and...

Method for forming a groove and method for manufacturing an...

Method for forming an array of thin film actuated mirrors

Method for forming cylindrical lens arrays for solid state image

Method for forming deflection grating