Etching a substrate: processes – Forming or treating optical article
Patent
1995-01-23
1998-04-14
McPherson, John A.
Etching a substrate: processes
Forming or treating optical article
216 26, 216 48, 430321, G02B 625
Patent
active
057387982
ABSTRACT:
A method for etching a tapered edge on a cladding layer 10 of an integrated optical waveguide by simultaneously etching a cured droplet of photoresist 16 and the core cladding material to translate the profile of the droplet to the cladding to provide a larger cladding thickness at the interface to the optical fiber 20 and a taper to the cladding thickness needed to control the performance of the integrated optic device. Advantages include selective thinning of the core cladding while maintaining a low loss coupling of the optical fiber to the waveguide core on the integrated device, and higher yield in production during edge polishing.
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Donaldson Richard L.
Kesterson James C.
McPherson John A.
Petersen Bret J.
Texas Instruments Incorporated
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