Method for fabricating an optical device

Details Method for fabricating an optical device Method for fabricating an optical device

1994-06-06

1996-03-19

Powell, William

Etching a substrate: processes

Forming or treating optical article

216 41, 216 59, 216 79, 1566331, 1566571, 15665911, B29D 1100

Patent

active

054997321

ABSTRACT:
An etching pattern for forming a groove to be mounted by an optical fiber, marks for positioning an optical semiconductor laser, a semiconductor photodetector, and an optical multiplexing and demultiplexing device, marks for aligning device, marks for aligning optical waveguides to the laser, the photodetector, and the multiplexing an demultiplexing device, and electric interconnections and pads for an electronic semiconductor device and the above described optical parts are defined on a semiconductor substrate prior to the formation of the optical waveguides.

REFERENCES:
patent: 4732646 (1988-03-01), Elsner et al.
patent: 5268066 (1993-12-01), Tabasky et al.
"Glass Waveguides on Silicon for Hybrid Optical Packaging", IEEE Journal of lightwave technology, vol. 7, No. 10, Oct. 1989, by C. H. Henry et al., pp. 1530-1539.
"Electronics Letters", vol. 22 No. 12, Jun. 5, 1986, pp. 642-644.

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