Method for forming an array of thin film actuated mirrors

Details Method for forming an array of thin film actuated mirrors Method for forming an array of thin film actuated mirrors

1995-05-04

1997-11-25

Chea, Thorl

Etching a substrate: processes

Forming or treating optical article

216 33, 216 36, 216 41, 359295, 359850, G02B 508

Patent

active

056908393

ABSTRACT:
A method for forming an array of thin film actuated mirrors for use in an optical projection system comprises the steps of: (a) providing a base; (b) depositing a separation layer on top of the base; (c) forming a first an electrodisplacive, a second, an elastic and a sacrificial layers successively on top of the separation layer; (d) forming an array of M.times.N supporting members, each thereof having a conduit; (e) patterning to form an array of multilayered actuated mirror structures; (f) attaching an active matrix included therein an array of transistors to the array of multilayered actuated mirror structures; (g) separating the base to form said array of thin film actuated mirrors. In the inventive method, the heat treatment of the electrodisplacive layer is carried out prior to the attaching of the active matrix, thereby preventing the transistors from being degraded by the heat.

REFERENCES:
patent: 5233456 (1993-08-01), Nelson
patent: 5379081 (1995-01-01), Kim et al.

Affiliated with

Also associated with

Rating

Method for forming an array of thin film actuated mirrors does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for forming an array of thin film actuated mirrors, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for forming an array of thin film actuated mirrors will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2103809