Method for fabricating micro optical elements using CMP

Details Method for fabricating micro optical elements using CMP Method for fabricating micro optical elements using CMP

2001-11-08

2008-08-26

Ahmed, Shamim (Department: 1792)

Etching a substrate: processes

Forming or treating optical article

C216S041000, C216S052000, C216S031000, C216S088000, C216S089000, C216S097000, C216S099000

Reexamination Certificate

active

07416674

ABSTRACT:
A technique for fabricating the required surface shapes for micro optical elements, such as curved micro mirrors and lenses, starts with a simple, binary for example, approximation to the desired surface shape. Then polishing, e.g., chemical mechanical polishing (CMP), is used to form the smooth optical surface. Specifically, starting with a mesa or blind hole, with a mesa profile, a smooth mirror or lens structure is fabricated.

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