Apparatus for adjusting the resonance frequency of a...
Apparatus for adjusting the resonance frequency of a...
Apparatus for conveying electrostatic charges, in particular for
Articulated MEMs structures
Axial fan motor and cooling unit
Balanced microdevice
Balanced microdevice and rotary electrostatic microactuator...
Balanced micromechanical device having two degrees of motion
Bi-stable electrostatic comb drive with automatic braking
Biased gap-closing actuator
Biased rotatable combdrive devices and methods
Capacitive micromachined ultrasonic transducer array with...
Centipede actuator motion stage
Charge screening in electrostatically driven devices
Charged rotor pole micromachine motor
Comb-shaped actuator with off centered electrodes
Compact electrostatic comb actuator
Complementary electrostatic driving apparatus for microactuator
Compliant bistable micromechanism
Compound stage MEM actuator suspended for multidimensional motio