Complementary electrostatic driving apparatus for microactuator

Details Complementary electrostatic driving apparatus for microactuator Complementary electrostatic driving apparatus for microactuator

1997-10-29

2000-10-03

Laballe, Clayton

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

310 40MM, 7351418, 7351423, H02N 100

Patent

active

061277673

ABSTRACT:
An electrostatic driving apparatus for a microactuator is provided, in which a parasitic capacitance is offset to improve the performance thereof. According to the complementary electrostatic driving apparatus for the microactuator, in order to prevent an excitation signal from being mixed with a sensing signal via the parasitic path formed of parasitic capacitance according to the structure of the microactuator and vibration characteristics thereof, which cause noise, signals having opposite polarities are applied to activating vibration plates using an inverter such that the activating vibration signals of each plate, which cause noise, are offset, thereby markedly improving the signal-to-noise ratio. Also, the vibration displacement can be easily detected by a circuit which is not integrated with an actuator. In addition, a sensing unit is simplified, reducing the initial costs. Further, when the excitation signals are applied at the both sides of the vibration direction of the suspended vibration plate, only the AC component, i.e., the .omega. component, of the electrostatic force acts, so that the resonant characteristics can be improved without an offset of the displacement.

REFERENCES:
patent: 5428259 (1995-06-01), Suzuki
patent: 5455547 (1995-10-01), Lin et al.
patent: 5757103 (1998-05-01), Lee et al.
K. Tanaka et al., "A micromachined vibrating gyroscope," Sensors and Actuators A, vol. A50, No. 1/02, Aug. 1, 1995, pp. 111-115.

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